Title:
GAS FEEDER
Document Type and Number:
Japanese Patent JPH1163398
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To prevent the overshoot of exhaust flow of exhaust gas in a gas feeding system and shorten exhaust time. SOLUTION: A gas feeder is provided with a gas feed pipeline 4 communicating a gas feed port 3 with a cylinder 1 charged with specified material gas, an exhaust pipeline 5 branching off from the gas feed pipeline 4, and a vacuum generator 10 interposed at the exhaust pipeline 5 and producing a vacuum in the exhaust pipeline 5 by the supply of purge gas so as to exhaust exhaust gas through the exhaust pipeline 5. In this case, a diaphragm valve 20 opened/ closed following the operating pressure of operating gas is disposed on a primary side of the vacuum generator 10 in the exhaust pipeline 5, and a pressure sensor 30 is disposed on a secondary side of the diaphragm valve 20. A detection signal from the pressure sensor 30 is fed back to a CPU 50, and the diaphragm valve 20 is delay-controlled on the basis of a control signal from the CPU 50.
Inventors:
KOMINO MITSUAKI
UCHISAWA OSAMU
CHIBA YASUHIRO
UCHISAWA OSAMU
CHIBA YASUHIRO
Application Number:
JP22584297A
Publication Date:
March 05, 1999
Filing Date:
August 07, 1997
Export Citation:
Assignee:
TOKYO ELECTRON LTD
MOTOYAMA ENG WORKS
MOTOYAMA ENG WORKS
International Classes:
F17C13/02; (IPC1-7): F17C13/02
Attorney, Agent or Firm:
Kikuhiko Nakamoto
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