Title:
GAS LIQUID SEPARATION BOX
Document Type and Number:
Japanese Patent JP2004014739
Kind Code:
A
Abstract:
To prevent the refuse of resist etc. from hardening and sticking in a gas liquid separation box for separating the mixed fluid of gas and liquid discharged from a discharge opening of a treatment device into the gas and liquid.
The gas liquid separation box for separating the mixed fluid of gas and liquid discharged from the discharge opening of the treatment device into the gas and liquid is provided with a cleaning means for the mixed fluid of gas and liquid inside. Cleaning liquid is supplied to the internal wall of the separation box, and a liquid component is discharged together with the cleaning liquid to prevent part of the liquid component in the gas-liquid separation box from hardening and sticking.
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Inventors:
HASHIMOTO MICHISATO
Application Number:
JP2002165265A
Publication Date:
January 15, 2004
Filing Date:
June 06, 2002
Export Citation:
Assignee:
HIRATA SPINNING
International Classes:
G02F1/13; B08B9/093; G02F1/1333; H01L21/027; (IPC1-7): H01L21/027; B08B9/093; G02F1/13; G02F1/1333