Title:
GAS SUPPLY SOURCE
Document Type and Number:
Japanese Patent JP3385536
Kind Code:
B2
Abstract:
PURPOSE: To provide a gas supply source wherein gastightness of the gas supply line can be inspected simply and easily without experienced skills.
CONSTITUTION: Gas supply line 3 including a gas vessel (gas cylinder 2), piping 4, a joint 5, a valve 6 and a flow controller 8 is contained in a cabinet 1. In the cabinet 1, there is a helium gas introduction line 11 as means of supplying inspection gas. To an outlet portion 9a of the gas supply line 3 there are connected a helium detector 14 and a vacuum exhaust pump 15.
Inventors:
Junro Sakai
Application Number:
JP21603391A
Publication Date:
March 10, 2003
Filing Date:
August 01, 1991
Export Citation:
Assignee:
ANELVA Co., Ltd.
International Classes:
F17D1/04; F17D5/02; H01L21/22; H01L21/223; (IPC1-7): F17D1/04; F17D5/02
Domestic Patent References:
| JP2146400A | ||||
| JP6074000U |
Attorney, Agent or Firm:
Masatsugu Suzuki