Title:
把持装置、素子の製造方法、及び基板装置の製造方法
Document Type and Number:
Japanese Patent JP6883207
Kind Code:
B2
Abstract:
To suppress a decrease in an operation rate of an apparatus as compared to a case in which a worker stops the apparatus and changes a push-up height of a push-up portion.SOLUTION: A gripping device includes an imaging unit that images an element moved to an imaging position among a plurality of elements on an adhesive surface, a push-up portion that pushes up the lower surface of the element together with the adhesive surface when the imaging unit can recognize the element and pushes up the lower surface of the element moved to the imaging position together with the adhesive surface after a push-up height is lowered when the imaging unit cannot recognize the element, and a gripping portion that grips the element pushed up by the push-up portion.SELECTED DRAWING: Figure 3
Inventors:
Mogami Itou
Yasuaki Hori
Yuji Kanda
Yasuaki Hori
Yuji Kanda
Application Number:
JP2017101264A
Publication Date:
June 09, 2021
Filing Date:
May 22, 2017
Export Citation:
Assignee:
Fuji Xerox Business Innovation Co., Ltd.
International Classes:
H01L21/67; H01L21/301; H05K13/04
Domestic Patent References:
| JP2016195194A | ||||
| JP2012064752A | ||||
| JP2013222716A |
Attorney, Agent or Firm:
Patent Service Corporation Taiyo International Patent Office