Title:
HARD FILM REMOVAL AGENT, AND METHOD OF REMOVING HARD FILM USING THE SAME
Document Type and Number:
Japanese Patent JP2005048248
Kind Code:
A
Abstract:
To provide a removal agent for removing a hard film of a Ti based material ( material of Ti, TiC, TiN, TiCN, TiAl, TiAlC, TiAlN or TiAlCr, or material comprising other metallic or nonmetallic elements in addition to the same) in a short period of time without exerting adverse effect on the surface of a base metal.
The hard film removal agent consists of an alkaline aqueous solution containing hydrogen peroxide of 1 to 60 mass%, and a surfactant, preferably, a nonionic surfactant of 0.05 to 5 mass%, and having a pH of 7.5 to 12.
Inventors:
WATANABE MASASHI
SANO YUUJIRO
SANO YUUJIRO
Application Number:
JP2003282503A
Publication Date:
February 24, 2005
Filing Date:
July 30, 2003
Export Citation:
Assignee:
ASAHI DENKA KOGYO KK
International Classes:
C23F1/38; C23F1/00; (IPC1-7): C23F1/38; C23F1/00
Attorney, Agent or Firm:
Michiteru Soga
Michiharu Soga
Hidetoshi Furukawa
Suzuki Kenchi
Kajinami order
Michiharu Soga
Hidetoshi Furukawa
Suzuki Kenchi
Kajinami order