Title:
HEAT INSULATING MATERIAL FOR SINGLE CRYSTAL-PULLING APPARATUS
Document Type and Number:
Japanese Patent JP3650840
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To obtain a heat insulating material for single crystal-pulling apparatus, having high insulating property, not causing pollution in single crystal pulling apparatus and contamination of single crystal and high durability and being inexpensive and capable of saving installation of heat-retaining cylinder between the inner wall surface of a hermetically sealed vessel body and a heater in a member for single crystal-pulling apparatus by so-called Czochralski process.
SOLUTION: In this heat-insulating material 40 for a single crystal-pulling apparatus 100 kept so as not to transfer heat of a heater 20 for heating a crucible 10 in the single crystal pulling apparatus 100 to the outside of a hermetically sealed vessel body 50, a substrate of the heat-insulating material 40 is formed of a carbonaceous fiber formed product and coat comprising a thermally decomposed carbon is formed on the surface of the carbonaceous fiber formed product.
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Inventors:
Teruhiko Oya
Application Number:
JP3305898A
Publication Date:
May 25, 2005
Filing Date:
February 16, 1998
Export Citation:
Assignee:
IBIDEN CO.,LTD.
International Classes:
C30B15/00; C30B29/06; (IPC1-7): C30B15/00; C30B29/06
Domestic Patent References:
| JP1167210A | ||||
| JP7041372A | ||||
| JP9328393A |
Attorney, Agent or Firm:
Takenori Hiroe