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Patent Searching and Data


Title:
HOUSING CONTAINER FOR PELLICLE
Document Type and Number:
Japanese Patent JP2007047546
Kind Code:
A
Abstract:

To transport a pellicle without causing deformation in an adhesive material of a support frame for a pellicle that is to be housed therein.

The housing container 1 for a pellicle for transporting a pellicle 5 comprising of a pellicle film 6 and a support frame 7 supporting the pellicle film 6 includes a tray 3, a cover 2 as a lid of the tray, and one or more mounting parts 4 inside either the tray 3 or the cover 2 for mounting the support frame 7, with the portion to mount the support frame being inclined with respect to the bottom face of the support frame 7.


Inventors:
YAJIMA TOSHITSUGU
KIKUCHI WATARU
Application Number:
JP2005233018A
Publication Date:
February 22, 2007
Filing Date:
August 11, 2005
Export Citation:
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Assignee:
SHINETSU POLYMER CO
International Classes:
B65D85/86; G03F1/62; G03F1/66
Domestic Patent References:
JP2001092113A2001-04-06
JP2004361649A2004-12-24
JPH0619124A1994-01-28
JPH07304111A1995-11-21
JPH10114388A1998-05-06
JP2003107679A2003-04-09
JP2001100394A2001-04-13
JPH1048812A1998-02-20
Attorney, Agent or Firm:
Iat International Patent Business Corporation