Title:
HOUSING CONTAINER FOR PELLICLE
Document Type and Number:
Japanese Patent JP2007047546
Kind Code:
A
Abstract:
To transport a pellicle without causing deformation in an adhesive material of a support frame for a pellicle that is to be housed therein.
The housing container 1 for a pellicle for transporting a pellicle 5 comprising of a pellicle film 6 and a support frame 7 supporting the pellicle film 6 includes a tray 3, a cover 2 as a lid of the tray, and one or more mounting parts 4 inside either the tray 3 or the cover 2 for mounting the support frame 7, with the portion to mount the support frame being inclined with respect to the bottom face of the support frame 7.
Inventors:
YAJIMA TOSHITSUGU
KIKUCHI WATARU
KIKUCHI WATARU
Application Number:
JP2005233018A
Publication Date:
February 22, 2007
Filing Date:
August 11, 2005
Export Citation:
Assignee:
SHINETSU POLYMER CO
International Classes:
B65D85/86; G03F1/62; G03F1/66
Domestic Patent References:
JP2001092113A | 2001-04-06 | |||
JP2004361649A | 2004-12-24 | |||
JPH0619124A | 1994-01-28 | |||
JPH07304111A | 1995-11-21 | |||
JPH10114388A | 1998-05-06 | |||
JP2003107679A | 2003-04-09 | |||
JP2001100394A | 2001-04-13 | |||
JPH1048812A | 1998-02-20 |
Attorney, Agent or Firm:
Iat International Patent Business Corporation