Title:
傾斜面又は曲面を持つ透明立体の高さマップの計算方法
Document Type and Number:
Japanese Patent JP6529830
Kind Code:
B2
Abstract:
The invention relates to a method for calculating a height map of a sample comprising a body of a transparent material having a refractive index (n) with an inclined or curved surface, the body being provided on an underlying surface extending laterally from underneath the body. The method comprising:
positioning a first area of a body of a transparent material with an inclined or curved surface and a second area of the underlying surface extending laterally from underneath the body under an optical profiler;
measuring a height map of the first area (ZIS) and the second area (ZUS) with the optical profiler; and,
calculating a height map of the inclined or curved surface (HIS) by using the refractive index, the measured height map of the first area (ZIS) and the second area (ZUS).
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Inventors:
Johannes Anna Kuedakers
Application Number:
JP2015119210A
Publication Date:
June 12, 2019
Filing Date:
June 12, 2015
Export Citation:
Assignee:
Mitutoyo Corporation
International Classes:
G01B11/06; G01B9/02; G02B21/00
Domestic Patent References:
| JP2011209098A |
Foreign References:
| US20060012582 | ||||
| US20060017936 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito