HYBRID CASCADE MODEL BASED PREDICTIVE CONTROL SYSTEM

Title:

HYBRID CASCADE MODEL BASED PREDICTIVE CONTROL SYSTEM

Document Type and Number:

Japanese Patent JP2004164648

Kind Code:

A

Abstract:

To provide a control system comprising thermal processing equipment of semiconductor substrates, such as a hybrid cascade MBPC (Model-Based Predictive Control) for a vertical thermal reactor and conventional control system.

In order to achieve effective dynamic linear models, a target temperature control range is divided into a plurality of temperature sub-ranges. For every temperature sub-range, and for every heating zone, a corresponding dynamic model is identified. During temperature ramp up/down, the control system is provided with a fuzzy control logic and inference engine for automatically switching the dynamic models according to the actual temperature. When thermocouple (TC) temperature measurement fails, a software soft sensor based on dynamic model computing is used to replace an actual TC sampling in a fixed position for a control system input. Consequently, when a TC failure occurs during a process, the process can be completed without loss of the semiconductor substrate being processed.

Inventors:

ZHENDUO LIU
HUUSSEN FRANK

Application Number:

JP2003382932A

Publication Date:

June 10, 2004

Filing Date:

November 12, 2003

Export Citation:

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Assignee:

ASM INT NV

International Classes:

H01L21/324; G05B11/42; G05B13/02; G05B13/04; G05D23/19; (IPC1-7): G05B13/04; G05D23/19; H01L21/324

Domestic Patent References:

JP2001505256A	2001-04-17
JP2002515648A	2002-05-28
JPH07104805A	1995-04-21
JP2002309272A	2002-10-23
JP2000509171A	2000-07-18

Attorney, Agent or Firm:

Eiji Saegusa
Yasumitsu Tate
Shinichi Mashita
Kimio Matsumoto
Tachibana Kenji

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