Title:
【発明の名称】薄層部品を製造するための偏光解析法と制御装置
Document Type and Number:
Japanese Patent JP2002518665
Kind Code:
A
Abstract:
A method for controlling the production of an object controlled by a gas panel, by performing an ellipsometric measurement on the object represented by its Mueller matrix; controlling, with a gas panel, the manufacture on the basis of the ellipsometric measurement. Certain parameters of the Mueller matrix are determined in advance, for characterizing the manufacture, and only these parameters are extracted from the ellipsometric measurement during manufacture, the parameters being two different parameters of the ellipsometric angles psi and Delta and trigonometric functions thereof.
Inventors:
Drevilon bernard
Application Number:
JP2000555062A
Publication Date:
June 25, 2002
Filing Date:
June 11, 1999
Export Citation:
Assignee:
Saint-El Nasional de la Rushche Suijantifik
International Classes:
G01N21/21; C23C14/54; C23C16/52; C30B25/16; G01B11/06; G01J4/00; H01L21/205; H01L21/66; (IPC1-7): G01N21/21; C23C14/54; C23C16/52
Attorney, Agent or Firm:
Masahiko Takeda (3 outside)