Title:
ILLUMINATION OPTICAL DEVICE
Document Type and Number:
Japanese Patent JPH06175028
Kind Code:
A
Abstract:
PURPOSE: To illuminate a substance to be illuminated with uniform illuminance distribution even in the case the wavelength band of illuminating light used is wide.
CONSTITUTION: The illuminating light from a light source 11 is changed to nearly parallel luminous flux by an input lens 12 and made incident on a secondary light source forming system 50. The system 50 is constituted by bundling many lens elements 51, and a light beam from a secondary light source 52 formed of the respective lens elements 51 passes through a condenser lens system 30 and illuminates the object 40 to be illuminated in a superposed state. The lens element 51 has the plural lens having different dispersion.
Inventors:
NAMIKAWA TOSHIYUKI
UCHIDA GEN
SAITO MICHIAKI
UCHIDA GEN
SAITO MICHIAKI
Application Number:
JP32319392A
Publication Date:
June 24, 1994
Filing Date:
December 02, 1992
Export Citation:
Assignee:
NIKON CORP
International Classes:
G02B19/00; (IPC1-7): G02B19/00
Attorney, Agent or Firm:
Satoshi Omori