Title:
Image formation quality assessment device
Document Type and Number:
Japanese Patent JP6184166
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an imaging performance evaluation device capable of discriminating aberration highly accurately without using a photodetector having a wide dynamic range.SOLUTION: An imaging performance evaluation device is constituted so that a rectangular beam having each different angle to the optical axis is radiated to an imaging optical system 2 from a rectangular beam generation device 1, by mounting on the rectangular beam generation device 1, a rotating mechanism 14 for rotating the rectangular beam around the optical axis of the imaging optical system 2.
Inventors:
Satoshi Imaizumi
Takataka Nakano
Takataka Nakano
Application Number:
JP2013104183A
Publication Date:
August 23, 2017
Filing Date:
May 16, 2013
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
G01M11/02; G02B17/00
Domestic Patent References:
| JP2006038488A | ||||
| JP2000121902A |
Attorney, Agent or Firm:
Hideaki Tazawa
Hamada Hatsune
Kume Teruyo
Hideo Kawamura
Hamada Hatsune
Kume Teruyo
Hideo Kawamura