Title:
INSPECTING METHOD FOR CONNECTED STATE OF TAB LEAD
Document Type and Number:
Japanese Patent JPH05251541
Kind Code:
A
Abstract:
PURPOSE: To realize an inspection of presence or absence of bump creeping with high reliability.
CONSTITUTION: A right side illuminated picture 55 is obtained in a state that a connected TAB lead is illuminated from its right side, and a left side illuminated picture 63 is obtained in a state that the lead is illuminated from its left side. Picture data 65 indicating a malfunction and picture data 71 indicating a TAB lead edge are separately output from both the pictures. Only picture data 72 of a bump creeping is taken out from the picture data indicating the malfunction based on both the output picture data and it is displayed.
Inventors:
FUSE TAKASHI
TSUKAHARA HIROYUKI
OSHIMA YOSHITAKA
ANDO MORITOSHI
TSUKAHARA HIROYUKI
OSHIMA YOSHITAKA
ANDO MORITOSHI
Application Number:
JP4889992A
Publication Date:
September 28, 1993
Filing Date:
March 05, 1992
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
H01L21/66; (IPC1-7): H01L21/66
Attorney, Agent or Firm:
Tadahiko Ito (2 outside)