Title:
MONITORING METHOD FOR PURITY OF PURE WATER
Document Type and Number:
Japanese Patent JPH05251542
Kind Code:
A
Abstract:
PURPOSE: To easily detect a trace amount of an impurity element of a ppt level in a short time in a method for monitoring purity of pure water to be used to manufacture a semiconductor device, etc.
CONSTITUTION: Pure water 9 is heated, a semiconductor substrate 11 is dipped in the heated water 9, then the substrate 11 is pulled up from the water 9, and an impurity element absorbed to the surface of the substrate 11 is detected.
Inventors:
OKUI YOSHIKO
NAKAJIMA KAZUJI
NAKAJIMA KAZUJI
Application Number:
JP4584292A
Publication Date:
September 28, 1993
Filing Date:
March 04, 1992
Export Citation:
Assignee:
FUJITSU LTD
FUJITSU VLSI LTD
FUJITSU VLSI LTD
International Classes:
H01L21/66; (IPC1-7): H01L21/66
Attorney, Agent or Firm:
Teiichi