To provide an inspection method and an inspection device capable of accurately inspecting characteristics of a surface shape by eliminating effects of a rear face reflected image by an inexpensive device configuration.
A stripe pattern 1 having light and shade patterns set such that a reflected image by a surface of a transparent tabular body and a reflected image by a rear face of the transparent tabular body are separated in an image signal acquired by imaging is determined as a stripe pattern suiting the transparent tabular body 3 (an object to be inspected). The surface shape of the transparent tabular body 3 is evaluated by image analysis using the determined stripe pattern 1 and only the reflected image by the surface of the transparent tabular body 3 of the stripe pattern 1.
OOTO HITOAKI
KATO MUNEHISA
SHIROYAMA ATSUSHI
| JP2004514882A | 2004-05-20 | |||
| JP2001502800A | 2001-02-27 |
Makoto Shiokawa
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