Title:
INSPECTION METHOD, INSPECTION DEVICE, AND PROGRAM
Document Type and Number:
Japanese Patent JP2023076064
Kind Code:
A
Abstract:
To provide an inspection method and the like capable of automatically determining whether an abnormal portion of a wiring pattern of a device leads to a defect.SOLUTION: An inspection method includes: an acquisition step (S10) of acquiring an abnormal portion image which is an image including an abnormal portion of a wiring pattern of a device obtained by image processing from an appearance inspection image of the device having a laminated structure having one or more layers in which patterns are formed; a generation step (S11) of generating a label image in which the abnormal portion is converted into a color label based on the layer in which the abnormal portion is located, from the abnormal portion image; and a determination step (S13) of determining whether the abnormal portion is a defect of the device by determining the overlap between the color label and the wiring pattern with no abnormal portion according to a predetermined decision tree by using a superimposed image obtained by superimposing the label image and a normal pattern image including a wiring pattern at a position corresponding to the abnormal portion of the device and without the abnormal portion.SELECTED DRAWING: Figure 20
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Inventors:
HASHIMOTO SHINICHIRO
Application Number:
JP2021189232A
Publication Date:
June 01, 2023
Filing Date:
November 22, 2021
Export Citation:
Assignee:
JOLED INC
International Classes:
G01N21/956; H01L21/66
Attorney, Agent or Firm:
Shuichi Yoshikawa
Masao Sobajima
Masao Sobajima