Title:
ION IRRADIATION DEVICE FOR POWDER/GRANULE
Document Type and Number:
Japanese Patent JP3540068
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To prevent the surface of a powder/granule within a vessel from being charged up positively during ion irradiation.
SOLUTION: A ring-like filament 34 is arranged just above a vessel 11 within a vacuum chamber, and a Faraday flag 35 is provided between them so as to be movable between a receiving position of ion beam and a non-receiving position. The thermionic current is regulated by the regulation of the heating power source 37 of the filament 34 to keep the potential on the surface of a powder/granule 12 at zero or a potential close thereto.
Inventors:
Yoshiaki Agawa
Application Number:
JP29041095A
Publication Date:
July 07, 2004
Filing Date:
October 12, 1995
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
G21K5/04; B01J19/08; C01B33/18; (IPC1-7): G21K5/04; B01J19/08; C01B33/18
Domestic Patent References:
| JP7150349A | ||||
| JP63221547A | ||||
| JP7228973A | ||||
| JP7034246A | ||||
| JP4183861A |
Attorney, Agent or Firm:
Yasuo Iisaka
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