Title:
JOINED BODY OF ALUMINA SINTERED BODIES AND THEIR JOINING METHOD
Document Type and Number:
Japanese Patent JP2003335583
Kind Code:
A
Abstract:
To enable easy and secure joining of alumina sintered bodies which are used as materials for plasma devices for fabricating semiconductor- fabricating devices, by forming a joint layer between the alumina sintered bodies using yttrium aluminum garnet (YAG) either alone or in combination with a rare-earth oxide other than YAG to minimize effects of thermal and mechanical stresses on the joints and to increase bond strength between the alumina sintered bodies to an unprecedented level.
In the joined body of the alumina sintered bodies, the alumina sintered bodies are mutually joined via the joint layer essentially comprising YAG.
Inventors:
UCHIMARU TOMONORI
KOBAYASHI YOSHIAKI
MURAYAMA HARUO
MORITA TAKASHI
KOBAYASHI YOSHIAKI
MURAYAMA HARUO
MORITA TAKASHI
Application Number:
JP2002141465A
Publication Date:
November 25, 2003
Filing Date:
May 16, 2002
Export Citation:
Assignee:
TOSHIBA CERAMICS CO
International Classes:
C04B37/00; (IPC1-7): C04B37/00
Attorney, Agent or Firm:
Takehiko Suzue (6 outside)
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