PURPOSE: To improve measuring accuracy of object displacement by eliminating measurement error caused by the spread of reflected laser light or ununiformity of character on the object surface and obtaining the exact position of the peak value of the reflection laser light.
CONSTITUTION: Constituted are a laser emitter 2 to irradiate an object A with laser light, an image sensor 4 to receive reflection laser reflected on the surface of the object through a lens 3, and a signal processor 9 to input the signal received from this image sensor 4 and calculate the peak position of light intensity of the reflection laser light. A light intensity distribution curve of the refletion laser light received with the image sensor 4 is calculated with least squares method and based on the calculated peak value of the light intensity distribution curve, a light reception position of the reflection laser light is obtained.
OBA KOZO
KINOSHITA MASAO
YOSHIDA HARUHIKO
KENTA TATSUYA
