Title:
LASER LIGHT SOURCE SYSTEM AND SURFACE INSPECTING APPARATUS USING THE SAME
Document Type and Number:
Japanese Patent JP2004138603
Kind Code:
A
Abstract:
To provide a laser light source system which achieves desired power by using a short-wavelength, low-power semiconductor laser.
The laser light source system 2 comprises light source units 11. Each light source unit 11 comprises one condenser lens 14 which condenses laser light emitted from one semiconductor laser 12, one condenser lens 15 which condenses laser light emitted from another semiconductor laser 13, and a focusing lens 17 which focuses the laser light condensed by the one condenser lens and the laser light condensed by the another condenser lens, and allows them to be incident on an incident end face 16a of a light guide means 16.
Inventors:
IWA YOICHIRO
SEKINE AKIHIKO
MIYAGAWA KAZUHIRO
ISOZAKI HISASHI
SEKINE AKIHIKO
MIYAGAWA KAZUHIRO
ISOZAKI HISASHI
Application Number:
JP2003313809A
Publication Date:
May 13, 2004
Filing Date:
September 05, 2003
Export Citation:
Assignee:
TOPCON CORP
International Classes:
G01N21/84; G01N21/47; G01N21/95; G01N21/956; G02B6/28; G02B6/42; G02B27/18; H01L21/66; G02B6/32; (IPC1-7): G01N21/84; G01N21/956; H01L21/66
Attorney, Agent or Firm:
Tamio Nishiwaki
Nishimura Kimiyoshi
Nishimura Kimiyoshi
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