To properly detect the stain on the lens protection cover of a laser irradiator in a laser processing apparatus.
In the laser processing apparatus for laser-processing a workpiece held on a chuck table by a laser irradiator, the laser irradiator comprises a substage condenser 31 condensing laser beams, and the condenser 31 comprises an objective lens 320 and a lens-protective cover 342 which is disposed between the objective lens 320 and the workpiece, and prevents the contamination of the objective lens 320 by blocking debris scattering from the workpiece. Since an imaging unit 7 disposed facing the condenser 31 detects the stain on the lens protective cover 342, the stain on the cover 342 can be confirmed without removing the cover 342 from the condenser 31.
| JP2010240674A | 2010-10-28 | |||
| JP2005334922A | 2005-12-08 |
Kyoko Kawamura
Ken Kubo