To provide a laser scribing method capable of performing a scribing reduced in a laser beam intensity necessary for once laser irradiation, and to provide a method for manufacturing a display device, a substrate, the display device, and an electronic apparatus.
A film 35 is formed on one surface of a substrate 35, and a modified part 37 is formed by converging laser beam 36 in the vicinity of the film 35. A cracked part 38 is formed at the center of the modified part 37, and a light absorption part 39 is formed in the periphery of the cracked part 38. A first layer comprising the modified parts 37 is formed by relatively moving a convergent lens 8 and the substrate 34. Further, a second layer comprising the modified parts 37 is formed by converging the laser beam 36 in each light absorption part 39 of the first layer comprising the modified parts 37. The face comprising the modified parts 37 is formed by sequentially repeating. The substrate 34 is divided by adding a local force along the face comprising the modified parts 37 in the thickness direction of the substrate 34.
COPYRIGHT: (C)2008,JPO&INPIT
Osamu Suzawa