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Title:
LIGHT-EMITTING ELEMENT AND LIGHT-EMITTING ELEMENT MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2012142626
Kind Code:
A
Abstract:

To provide a light-emitting element having a light-emitting layer of improved crystallinity and easy for mass production and a manufacturing method of the light-emitting element.

A light-emitting element manufacturing method comprises: a step of crystal growing a laminate including an etching easy layer adjacent to a first substrate composed of a III-V compound semiconductor and a light-emitting layer composed of a nitride-based semiconductor on the first substrate; a step of forming a transparent electrode and a first metal layer on the laminate in this order; a step of bonding a surface of a second metal layer provided on a second substrate with a surface of the first metal layer by heating the first and second metal layers in a stuck state; and a step of separating the first substrate and the second substrate on which the light-emitting layer is provided by removing the etching easy layer by use of solution etching or removing the etching easy layer by use of mechanical polishing.


Inventors:
SAEKI AKIRA
Application Number:
JP2012100218A
Publication Date:
July 26, 2012
Filing Date:
April 25, 2012
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
H01L33/32; H01L33/10
Domestic Patent References:
JP2005259912A2005-09-22
JP2005217112A2005-08-11
JP2000260760A2000-09-22
JP2005175462A2005-06-30
JP2007180142A2007-07-12
Attorney, Agent or Firm:
Masahiko Hinataji