Title:
LIQUID FEED NOZZLE AND TREATING METHOD
Document Type and Number:
Japanese Patent JP2001239187
Kind Code:
A
Abstract:
To provide a liquid feed nozzle and a liquid treating method wherein a large quantity of liquid is fed onto a substrate to be treated without imparting an impact to it and without mixing bubbles into the liquid so that a uniform and accurate pattern can be obtained, whereby a liquid treatment free from defect due to dust can be performed with a high degree of quality.
The liquid feed nozzle includes a nozzle cylinder body provided with a fluid inlet port, a first and second straightening plates, a first and second buffer parts, and a laminar flow forming means.
Inventors:
TAKANO MICHIROU
INOUE YOSHIKAZU
MUROTA TETSUYA
INOUE YOSHIKAZU
MUROTA TETSUYA
Application Number:
JP2000121810A
Publication Date:
September 04, 2001
Filing Date:
March 17, 2000
Export Citation:
Assignee:
SIGMA MELTEC LTD
International Classes:
B05B1/14; B05C5/00; B05C11/00; (IPC1-7): B05B1/14; B05C5/00; B05C11/00
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