Title:
MAGNETIC FIELD TYPE ELECTRON LENS
Document Type and Number:
Japanese Patent JPS5299764
Kind Code:
A
Abstract:
PURPOSE: To reduce various stigmatisms by making arrangement in such a way that a sample and iris can be set between No.1 magnetic pole and No.2 magnetic pole of the magnetic field electron lens with permanent magnet.
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Inventors:
KASAI SHIYOUZOU
Application Number:
JP1604076A
Publication Date:
August 22, 1977
Filing Date:
February 18, 1976
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01J37/143; H01J37/14; (IPC1-7): H01J37/14