To provide a compact and simple structured magnetic sensor obtained by forming a recessed portion on the substrate so as to have sensitive axes to either the X-axis direction, the Y-axis direction, and the Z-axis direction, by preparing at least one hall element on the slope of concave portion, and by preparing at least one hall element on the flat face of substrate, and also to provide a manufacturing method thereof.

Hall elements 6 and 7 formed on the flat face of silicon substrate 1 have a sensitive axis in the Z-axis direction. On the other hand, since all the hall elements 3 to 5 formed on the slope of concave portion 2 have sensitive axes in the directions perpendicular to the slope or the slant directions of silicon substrate, the resultant components are separated to the components of the Z-axis direction and the Y-axis direction or components of the Z-axis direction and the X-axis direction, the intensity can be sensed of magnetic field of the X-axis direction, the Y-axis direction, and the Z-axis direction. The present magnetic sensor is, therefore, detects the intensity of magnetic field in the triaxial directions as a whole.