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Title:
MANUFACTURE OF ABRASIVE PAD
Document Type and Number:
Japanese Patent JP2000263422
Kind Code:
A
Abstract:

To manufacture an abrasive pad consisting of a hard resin plate having closed cells uniformly present therein with good quality reproducibility by covering the circumference of a resin plate with a gas barrier material, impregnating the resin plate with a monomer, and then heating and hardening the resulting resin plate.

This method comprises a first step of covering the circumference of a resin plate having closed cells with a gas barrier material and a second process of impregnating the resin plate with a monomer. Any of the first step and the second step can be performed first. When the first step is performed first, for example, the monomer is injected into the system after the circumference of the resin plate with the material having gas barrier property, and the monomer is impregnated into the resin plate. The first step is preferably performed first from the viewpoint of the simple process and satisfactory working environment. This method further comprises a third step of heating and hardening the resin plate covered with the gas barrier material. According to this, an abrasive pad can be completed.


Inventors:
HASHISAKA KAZUHIKO
JIYOU KUNITAKA
OKA TETSUO
Application Number:
JP7004299A
Publication Date:
September 26, 2000
Filing Date:
March 16, 1999
Export Citation:
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Assignee:
TORAY INDUSTRIES
International Classes:
B24B37/20; B24B37/24; B29D99/00; H01L21/304; (IPC1-7): B24B37/00; B29D31/00; H01L21/304