Title:
MANUFACTURE OF HIGH-SENSITIVITY HALL ELEMENT
Document Type and Number:
Japanese Patent JPH04229670
Kind Code:
A
Abstract:
PURPOSE:To realize the high-sensitivity characteristic of the title element by means of a magnetic amplification effect by a method wherein a sheet composed of a magnetic material is worked to be the shape of magnetic amplification chips, it is bonded to the surface of a substrate so as to match the pattern of a Hall element and, after that, it is separated into individual magnetic amplification chips. CONSTITUTION:A sheet 5 composed of a magnetic material is bonded to the surface of a substrate 1 on which a pattern for Hall elements has been formed. Then, a resist 6 having the pattern of magnetic amplification chips is formed, by a photolithographic operation, on the surface of the sheet 5 so as to match the pattern for the Hall elements on the surface of the substrate 1. Then, the sheet 5 is worked to the shape of the magnetic amplification chips by using a cutting technique such as a dicing saw or the like; the sheet 5 is etched by making use of the resist as a mask. Thereby, it is divided into the magnetic amplification chips. Each chip is cut into individual Hall-element chips; they are die-bonded, wire-bonded and molded. Thereby, each magnetic amplification chip can be arranged, with good accuracy, on the surface of a Hall-element magnetism-sensing part.
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Inventors:
ITO TAKASHI
HARADA KENZO
HARADA KENZO
Application Number:
JP9712591A
Publication Date:
August 19, 1992
Filing Date:
April 26, 1991
Export Citation:
Assignee:
ASAHI CHEMICAL IND
International Classes:
H01L43/14; (IPC1-7): H01L43/14
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