Title:
DEPOSITION OF THALLIUM OXIDE FOR CONTROLLED THALLIUM SUPERCONDUCTOR FILM, AND CONSTITUTION OF REACTOR
Document Type and Number:
Japanese Patent JPH04229669
Kind Code:
A
Abstract:
PURPOSE: To manufacture a thallium and copper oxide-based high-temperature superconducting film on various substrates by providing a container having a large cavity for containing a substrate and a film, and providing this container with an opening part through which thallium can pass. CONSTITUTION: The container having a cavity 20 which is sufficiently large to contain a substrate and film is provided as the container of a reactor 10. The container has an opening part through which thallium can pass. For example, the reactor 10 is equipped with a top plate 12 and a base plate 14 which function as a susceptor. These plates 12 and 14 function as reproducible reactive substances, which are effective for controlling of the deposition temperature in a heat treatment and give a temperature gradient between a coating film 22 and a deposited film 16 which face it. Further, the cavity 20 is surrounded with a cap plate 22 and a spacer foil. Consequently, the thallium and copper oxide-based high-temperature superconducting film can be manufactured on various substrates.
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Inventors:
MAIKERU MAATEIN EDEII
UIRIAMU REBIN ORUSON
TEIMOSHII UORUTON JIEIMUZU
UIRIAMU REBIN ORUSON
TEIMOSHII UORUTON JIEIMUZU
Application Number:
JP9761791A
Publication Date:
August 19, 1992
Filing Date:
April 26, 1991
Export Citation:
Assignee:
SUUPAAKONDAKUTAA TEKUNOROJIIZU
International Classes:
C01G15/00; C23C14/08; C23C14/34; C23C14/54; C23C14/58; C30B11/00; C30B23/02; C01G1/00; C30B33/00; F27B17/00; H01L39/14; H01L39/24; H01P1/203; (IPC1-7): C01G1/00; C01G15/00; C23C14/08; C23C14/34; F27B17/00; H01L39/24
Attorney, Agent or Firm:
Osamu Kawamiya (1 person outside)
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