PURPOSE: To obtain a stacked magnetic material having excellent magnetic characteristics by ion beam sputtering of Pd-Mn alloy film including the specific atomic % of Mn into a magnetic material of Ni-Fe group alloy or by stacking such alloy film with assist ion beam and then putting such material into heat processing under the magnetic field.

CONSTITUTION: In a method of manufacturing a stacked magnetic material wherein a Pd-Mn group alloy film containing Mn of 35 to 40 atomic % is stacked on a magnetic material of Ni-Fe group alloy by the ion beam sputtering method and the interface is improved by the dual ion beam method in which assist ion beam is applied to the magnetic material of Ni-Fe group alloy, followed by the heat treatment under the magnetic field. Thereby, an anti ferromagnetic film which can mutual exchange effect with an Ni-Fe group magnetic film as a magneto-resistance effect element and ensures high stability of phase can be obtained and a stacked layer magnetic material having the magnetic field for mutual exchange effect and a small coersive force can also be obtained.