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Title:
MANUFACTURE OF SURFACE LIGHT-EMISSION LASER
Document Type and Number:
Japanese Patent JPH10200210
Kind Code:
A
Abstract:

To provide a method for manufacturing a surface light-emission laser element of low cost, by suppressing variation in element characteristics caused by dispersion in size of current constricted region.

Relating to a method of manufacturing a surface light-emission laser comprising such configuration as having a partial high-resistance so oxidized as to constriction an injection current to an active layer 3, a multi-layer film is grown on a substrate 1, and an oxide layer 5 is provided near the active layer 3, then an anti-oxidation layer 7 is selectively formed only in a light- emission region on the oxide layer 5, then the entire is oxidized to selectively oxidize only an exposed part of the oxide layer 5, and then a multi-layer film is grown for forming a current constriction structure.


Inventors:
KOSAKA HIDEO
Application Number:
JP294497A
Publication Date:
July 31, 1998
Filing Date:
January 10, 1997
Export Citation:
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Assignee:
NEC CORP
International Classes:
H01L21/203; H01S5/00; H01S5/183; (IPC1-7): H01S3/18; H01L21/203
Attorney, Agent or Firm:
Wakabayashi Tadashi