PURPOSE: To manufacture a target member for vapor-deposition having a good shaped and dimensional accuracy at good yield.

CONSTITUTION: Into a high frequency induction furnace 7 in a reduced pressure suction casting apparatus 1, Al, Si and Fe are charged at wt. ratio of 6:9:85 and also, heated at 1520-1550°C under vacuum condition to obtain molten metal 11. Then gaseous Ar is introduced into the high frequency induction furnace 7 to rise the pressure to about 1 atm and also, the pressure in the reduced pressure vessel 9 is reduced to 1/2 atm. and the molten metal 11 is sucked into every corners in each cavity 3. When at least the surface of the molten metal is solidified, a disk under semi-solidified condition is taken out and incorporated in a hot static pressure forming apparatus and kept for 2hrs under condition of 1200°C and 1200 atm pressure. In this target member for vapor- deposition, any pore having ≥5μ diameter is entirely not observed and the uniform crystal grains are obtd. Further, involving of a refractory is not developed and the yield is extremely high, such as about 95%.