Title:
MANUFACTURE OF THIN FILM MAGNETIC RECORDING HEAD
Document Type and Number:
Japanese Patent JPS5954023
Kind Code:
A
Abstract:
A desired feature of deposition material is produced on a substrate by forming an adhesion inhibitor on the substrate in a pattern whose inner edges are adjacent the bounds of the feature being produced. A seedlayer is deposited over the adhesion inhibitor and exposed portions of the substrate, and a mask is formed over the seedlayer adjacent the edges of the adhesion inhibitor, the inner edges of the mask defining the feature being produced. A deposition material is deposited over the exposed seedlayer, and the mask is removed. Unwanted portions of the seedlayer and deposition layer are removed by mechanically lifting off. The adhesion inhibitor serves to inhibit the bonding of the seedlayer to the substrate sufficiently to enable the mechanical lift-off. The adhesion inhibitor is removed, either by lifting off with the seedlayer and deposition layer, or subsequently.
Inventors:
BIITO GUIDO KIIRU
TSUAN FUOTSUKU TORAN
MAARA MICHIERE KOORAA
RARII DEIIN JINMAAMAN
PATORITSUKU KAMINGUSU DAASUTO
TSUAN FUOTSUKU TORAN
MAARA MICHIERE KOORAA
RARII DEIIN JINMAAMAN
PATORITSUKU KAMINGUSU DAASUTO
Application Number:
JP14178683A
Publication Date:
March 28, 1984
Filing Date:
August 02, 1983
Export Citation:
Assignee:
MAGNETIC PERIPHERALS INC
International Classes:
G03F7/00; G11B5/31; H01F41/34; H05K3/04; (IPC1-7): G11B5/12; G11B5/42
Attorney, Agent or Firm:
Hideto Asamura
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