Title:
炭素薄膜の製造方法、炭素薄膜を含んだ電子素子及び炭素薄膜を含んだ電気化学素子
Document Type and Number:
Japanese Patent JP5620348
Kind Code:
B2
Abstract:
A method of preparing a carbon thin film, and electronics including the carbon thin film.
Inventors:
李 泰 雨
崔 喜 哲
卞 善 禎
崔 喜 哲
卞 善 禎
Application Number:
JP2011160969A
Publication Date:
November 05, 2014
Filing Date:
July 22, 2011
Export Citation:
Assignee:
浦項工科大学校 産学協力団
International Classes:
C01B31/02; B82Y20/00; B82Y40/00; H01L21/336; H01L29/786; H01L51/05; H01L51/30; H01L51/40; H01L51/50; H01M4/1393; H01M4/587; H01M4/96; H05B33/02; H05B33/10; H05B33/14; H05B33/26; H05B33/28
Attorney, Agent or Firm:
Hatta international patent business corporation