Title:
電極構造の製造方法
Document Type and Number:
Japanese Patent JP4666608
Kind Code:
B2
Inventors:
Akira Honda
Toshiyuki Sugawara
Yasuhiro Tanaka
Toshiyuki Sugawara
Yasuhiro Tanaka
Application Number:
JP2005190754A
Publication Date:
April 06, 2011
Filing Date:
June 29, 2005
Export Citation:
Assignee:
Nippon Inter Co., Ltd.
International Classes:
H01L21/60
Domestic Patent References:
| JP2003045877A | ||||
| JP63121448U | ||||
| JP3160723A | ||||
| JP2003229450A | ||||
| JP2004502294A |
Attorney, Agent or Firm:
Kozo Sakakibara