To provide a manufacturing method for a liquid droplet discharging head in which individual heads can be easily divided from a laminated structure in which a plurality of heads are formed, and the wall of silicon is prevented from being formed on the rear end section of an electrode taking-out section.
A first board 1 on which a vibration plate 5 and the electrode taking-out section 14 are formed, is bonded to a second board 2 which is stacked on the first board. A plurality of dividing lines are installed at the section in which the first board and the second board are stacked, and a head is divided into individual heads by the manufacturing method for the liquid droplet discharging head. By irradiating the first board with a laser beam along the dividing lines, a material on the dividing lines is denatured, and the patterning for the electrode taking-out section is performed along the denatured dividing lines to the first board. The first board is wet-etched while making a part of the electrode taking-out section into a non-etched region for which the etching is not applied. The first board and the second board are divided into individual heads along the denatured dividing lines, and the non-etched region is etched after the heads have been divided.
KOMATSU HIROSHI
SAKASHITA YUKI
Kiyoshi Yasushima
Souji Sasaki
Noboru Omura
Takanashi Norio
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