Title:
メタルマスクの製造方法
Document Type and Number:
Japanese Patent JP6729255
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method of manufacturing a metal mask such that when the metal mask having an opening part formed using a laser is manufactured, a surface of a metal substrate where the metal mask is formed can be protected and sticking debris and dross can be removed together.SOLUTION: There is provided a method of manufacturing a metal mask that includes the following processes 1), 2), 3), and 4). 1) A recessed part is formed by etching on a first surface side of the metal substrate. 2) A protective film is formed on the first surface side including the recessed part and on a second surface side of the metal substrate. 3) An opening part is formed by irradiating the recessed part where the protective film is formed and a part facing the recessed part on the second surface side with laser light. 4) The protective film on the first surface side and the protective film on the second surface side are removed.SELECTED DRAWING: Figure 1
Inventors:
Satoshi Noda
Tetsuya Kobayashi
Tetsuya Kobayashi
Application Number:
JP2016193819A
Publication Date:
July 22, 2020
Filing Date:
September 30, 2016
Export Citation:
Assignee:
Toppan Printing Co., Ltd.
International Classes:
H01L51/50; C23C14/04; H05B33/10
Domestic Patent References:
| JP2015021179A | ||||
| JP2014133938A | ||||
| JP2011071038A | ||||
| JP2014133932A | ||||
| JP2010005629A | ||||
| JP2014133395A | ||||
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