Title:
Manufacturing method of semiconductor device
Document Type and Number:
Japanese Patent JP5994938
Kind Code:
B2
Inventors:
Atsushi Yoshimoto
Application Number:
JP2015519623A
Publication Date:
September 21, 2016
Filing Date:
May 12, 2014
Export Citation:
Assignee:
Fuji Electric Co., Ltd.
International Classes:
H01L21/336; H01L21/28; H01L29/739; H01L29/78
Domestic Patent References:
| JP2012064641A | 2012-03-29 |
Foreign References:
| US20030160270A1 | 2003-08-28 | |||
| US20060216895A1 | 2006-09-28 |
Attorney, Agent or Firm:
Suzuki Isobe