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Patent Searching and Data


Title:
MANUFACTURING METHOD OF VIBRATOR, VIBRATOR AND ELECTRONIC EQUIPMENT
Document Type and Number:
Japanese Patent JP2006148603
Kind Code:
A
Abstract:

To provide a method of manufacturing a vibrator with a desired characteristic by simple manufacturing steps at a low cost, the vibrator manufactured by using this manufacturing method, and electronic equipment provided with the vibrator.

The manufacturing method of the vibrator including a moving part 322 having a prescribed pattern and a support 23 for supporting the vibratably moving part 322 and vibrated by driving the moving part 322 includes steps of: forming a resin layer 6 formed from a photocurable resin as a principal material on the surface of a processing board 5; applying etching to the processing board 5 to form the moving part 322; and forming the support 23 by removing the part of the resin layer 6 turned into an uncured state by selective light irradiation.


Inventors:
NAKAMURA TOMOSUKE
Application Number:
JP2004336691A
Publication Date:
June 08, 2006
Filing Date:
November 19, 2004
Export Citation:
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Assignee:
SEIKO EPSON CORP
International Classes:
H03H3/007; H03H9/24
Attorney, Agent or Firm:
Tatsuya Masuda
Kazuo Asahi