To provide a method of manufacturing a vibrator with a desired characteristic by simple manufacturing steps at a low cost, the vibrator manufactured by using this manufacturing method, and electronic equipment provided with the vibrator.
The manufacturing method of the vibrator including a moving part 322 having a prescribed pattern and a support 23 for supporting the vibratably moving part 322 and vibrated by driving the moving part 322 includes steps of: forming a resin layer 6 formed from a photocurable resin as a principal material on the surface of a processing board 5; applying etching to the processing board 5 to form the moving part 322; and forming the support 23 by removing the part of the resin layer 6 turned into an uncured state by selective light irradiation.
Kazuo Asahi
Next Patent: ORIGINAL IMAGE READER AND IMAGE FORMING APPARATUS WITH THE ORIGINAL IMAGE READER