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Title:
MARKING INSPECTION APPARATUS
Document Type and Number:
Japanese Patent JP2008058150
Kind Code:
A
Abstract:

To provide a marking inspection apparatus capable of performing a total inspection.

In this apparatus, a slit light 31 is applied in a line from a laser device 32 in the width direction of a work 11 while moving a stage 63, and the slit light applied to a marked surface 2 of the workpiece 11 is imaged by a CCD camera 41 and taken into a control unit 71. A movement position of the stage 63 and an imaged position 101 and received light intensity of the slit light 31 are associated with one another and stored in a storage device, and also three-dimensional information of the marked surface 2 is computed based on the movement position of the stage 63 and the imaged position 101 and stored in the storage device. After smoothing the three-dimensional information according to the receiving light intensity, a change in depth data which the three-dimensional information has is converted into the change in the density, which thickens in proportion to the depth, to generate a density image 111, and this density image is stored in the storage device and displayed in a monitor.


Inventors:
NOSO KAZUNORI
YOKOTA GEN
Application Number:
JP2006235367A
Publication Date:
March 13, 2008
Filing Date:
August 31, 2006
Export Citation:
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Assignee:
NIDEC TOSOK CORP
International Classes:
G01B11/25; G01B11/22; G01N21/88; G06T1/00
Domestic Patent References:
JPH0933227A1997-02-07
JP2002358483A2002-12-13
JP2001221619A2001-08-17
Attorney, Agent or Firm:
Chiaki Miyoshi



 
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