Title:
マスクブランク、転写用マスク、転写用マスクの製造方法、及び半導体デバイスの製造方法
Document Type and Number:
Japanese Patent JP5900773
Kind Code:
B2
Inventors:
Atsushi Kominato
Jun Nozawa
Hiroyuki Iwashita
Hashimoto Masahiro
Jun Nozawa
Hiroyuki Iwashita
Hashimoto Masahiro
Application Number:
JP2011241317A
Publication Date:
April 06, 2016
Filing Date:
November 02, 2011
Export Citation:
Assignee:
HOYA CORPORATION
International Classes:
G03F1/58; G03F1/50
Domestic Patent References:
| JP2004537758A | ||||
| JP2007241065A | ||||
| JP2007292824A |
Foreign References:
| WO2010050447A1 | ||||
| WO2010113475A1 |
Attorney, Agent or Firm:
Hajime Tsukuni
Yasuo Yanagibashi
Takashi Ishioka
Yasuo Yanagibashi
Takashi Ishioka