To provide a mechanism for adjusting a camera for a substrate inspection apparatus, for easily and highly accurately adjusting the setting of a super high resolution camera even in a state where a substrate to be inspected is moved and conveyed.
The mechanism for adjusting the setting position of the camera for a substrate inspection apparatus includes: a tilt adjustment mechanism having a base plate for adjustment prepared for attaching the camera body to a vertical attachment surface in a face-down state, and rotating the camera body around an axis vertical to the attachment surface; a height adjusting mechanism for moving the camera body in the vertical direction; a rotation adjusting mechanism for rotating the camera body around the lens center axis of the camera body; and a holding mechanism for fixedly holding the camera body.
KONO MASAKI
KOBAYASHI RYOSUKE
NOSE KENJI
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