Title:
METAL MASK
Document Type and Number:
Japanese Patent JP2021143423
Kind Code:
A
Abstract:
To provide a metal mask having improved reliability.SOLUTION: A metal mask in one embodiment includes a metal thin film containing a first area and a second area, and a plurality of openings penetrating the metal thin film are provided on the first area and the second area respectively. A density of openings in the first area is smaller than a density of openings in the second area, and the first area contains an etching part adjacent to the opening, and having a thickness smaller than a thickness of the metal thin film, to thereby minimize deformation of the metal mask.SELECTED DRAWING: Figure 6A
Inventors:
KIM SEIL
KIM JONGBUM
AHN JUNGHYUN
LEE SANG MIN
KIM JONGBUM
AHN JUNGHYUN
LEE SANG MIN
Application Number:
JP2021034713A
Publication Date:
September 24, 2021
Filing Date:
March 04, 2021
Export Citation:
Assignee:
SAMSUNG DISPLAY CO LTD
International Classes:
H01L21/3065; C23C14/04; H01L51/50; H05B33/10
Attorney, Agent or Firm:
Patent business corporation port