PURPOSE: To effectively utilize metal vapor and to increase a production amt. by disposing erecting parts facing each other at a prescribed height near the metal evaporating part of a crucible along the aperture of the crucible.
CONSTITUTION: The bottom of a vapor sealing device 13 is provided with the erecting parts 20 facing each other at the prescribed height along the aperture of the crucible 12. The height (h) of the erecting parts 20 is so regulated that the erecting parts are arranged on the side outer than the angle viewing the outermost electrodes 17a, 17i of recovering electrodes 17 from the evaporating part in the crucible 12. The recovering electrodes 17 are arranged in an angle range of respectively about 10° to the right and left around the perpendicular line passing the center in the short side direction of the crucible 12 as a center. The base of the vapor sealing device 13 is formed as the erecting parts 20, by which the evaporation amt. of the metal vapor flow 14 contributing to a photoreaction by flowing within this arrangement angle is increased.
KONO SUSUMU
KUWATA TOMOE
MITSUBISHI HEAVY IND LTD
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