Title:
ポジ型ホトレジスト組成物およびレジストパターンの形成方法
Document Type and Number:
Japanese Patent JP4364596
Kind Code:
B2
Inventors:
Shinzaka Hidesaka
Satoshi Tate
Kubo Atsuko
Satoshi Tate
Kubo Atsuko
Application Number:
JP2003345792A
Publication Date:
November 18, 2009
Filing Date:
October 03, 2003
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
G03F7/004; G02F1/1343; G02F1/1368; G03F7/022; H01L21/027
Domestic Patent References:
| JP5113662A | ||||
| JP11153863A | ||||
| JP10310545A | ||||
| JP2002328473A |
Attorney, Agent or Firm:
Sumio Tanai
Masatake Shiga
Masakazu Aoyama
Suzuki Mitsuyoshi
Noriko Yanai
Masatake Shiga
Masakazu Aoyama
Suzuki Mitsuyoshi
Noriko Yanai