Title:
METHOD AND APPARATUS FOR CORRECTING DEFECT
Document Type and Number:
Japanese Patent JP2008180796
Kind Code:
A
Abstract:
To provide a technique which can always stably perform levelling (film thickness equalization) of ink applied onto a defect part.
A method of correcting defects has a step (S20) of applying a liquid material onto a minute region on a substrate and a step (S40) of pressurizing the applied liquid material by pressing a pressurizing head having a flat surface facing the substrate to the substrate so that the flat surface covers whole minute region. Levelling for uniformizing thickness of the liquid material can be performed by uniformly pressurizing the liquid material at the whole minute region and consequently defect correction of high quality can be attained.
Inventors:
YAMANAKA AKIHIRO
Application Number:
JP2007012796A
Publication Date:
August 07, 2008
Filing Date:
January 23, 2007
Export Citation:
Assignee:
NTN TOYO BEARING CO LTD
International Classes:
G02B5/20; G02F1/1335
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai
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