To provide a method and an apparatus for correcting a shot amount of an electronic beam drawing apparatus capable of correcting a change in a CD ray width due to a delay during exposure.

The method and the apparatus for correcting the shot amount of the electronic beam drawing apparatus is configured such that a state of a pattern width in a test mode is recorded up to an image drawing end; a shot amount correction value in an actual image drawing is obtained on the basis of the pattern width; a resist sensitivity ratio, and an image drawing prediction time in an image drawing start in the test mode; and the image drawing accuracy is corrected by adding the shot amount correction value to the image drawing data when no correction is applied. As a result, the change in the CD ray width due to a delay during exposure can be corrected.