Title:
METHOD AND APPARATUS FOR SEPARATING AND RECOVERING PERFLUORO COMPOUND GAS
Document Type and Number:
Japanese Patent JP3151151
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To recover at least one kind of perfluoro compd. gas from a gas mixture.
SOLUTION: A gas mixture of predetermined pressure containing at least one kind of perfluoro compd. gas and at least one kind of carrier gas is provided and a glass like polyer film having a supply side and a permeated matter side is provided. The supply side of the film is brought into contact with the gas mixture and conc. gas substantially containing at least one kind of the perfluoro compd. gas is taken out from the supply side of the film as a non- permeated matter stream of which the pressure is substantially equal to predetermined pressure and a lean gas mixture substantially composed of at least one kind of carrier gas is taken out from the permeated matter gas side of the film as a permeated matter stream.
Inventors:
Yao-En Lee
Joseph E. Paganesse
David Bassalo
Gregory K. Fleming
Joseph E. Paganesse
David Bassalo
Gregory K. Fleming
Application Number:
JP18787796A
Publication Date:
April 03, 2001
Filing Date:
July 17, 1996
Export Citation:
Assignee:
Rail Liquide Society Anonymous Pool Retude e Rex Prowation de Procede Georges Claude
International Classes:
B01D53/68; B01D53/00; B01D53/02; B01D53/22; B01D53/32; B01D63/02; B01D71/48; B01D71/50; B01D71/56; B01D71/62; B01D71/64; B01D71/68; C07C17/38; (IPC1-7): B01D53/22; B01D63/02; B01D71/48
Domestic Patent References:
| JP3284335A | ||||
| JP63126522A | ||||
| JP6254367A | ||||
| JP8312898A |
Attorney, Agent or Firm:
Takehiko Suzue (4 outside)