Title:
METHOD AND DEVICE FOR CUTTING PROTECTIVE TAPE
Document Type and Number:
Japanese Patent JP2006007367
Kind Code:
A
Abstract:
To quickly carry out angle adjustment of a cutter blade for changing/adjusting a crossing angle of the cutter blade to a surface of a semiconductor wafer in the wafer diameter direction in a method for cutting out a protective tape stuck to the surface of the semiconductor along an outer shape of the wafer by travelling the cutter blade along the periphery of the semiconductor wafer.
The angle of the cutter blade 12 is changed around a cutting site where a blade edge of the cutter blade 12 gets in contact with the protective tape T.
Inventors:
YAMAMOTO MASAYUKI
MORI NORIO
MORI NORIO
Application Number:
JP2004188042A
Publication Date:
January 12, 2006
Filing Date:
June 25, 2004
Export Citation:
Assignee:
NITTO DENKO CORP
International Classes:
B26D1/36; B26D7/26; H01L21/00
Attorney, Agent or Firm:
Tsutomu Sugiya
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