Title:
METHOD AND DEVICE FOR DETECTING PARTICLE
Document Type and Number:
Japanese Patent JPH03223652
Kind Code:
A
Abstract:
PURPOSE: To detect a particle of smaller than 0.1μm on a test surface by coupling a means which forms an oversaturation local area with a means which detects a condensed small drop.
CONSTITUTION: A test object 13 supported by a supporter body 11 can move in B direction with a wheel 16. Meanwhile, a core 17 is supplied with an evaporable liquid such as alcohol, and this is heated, so that an oversaturated area 19 is formed on a surface 14 of the test object 13. When a small drop 15 on the surface 14 passes the area 19, the small drop 15 is condensed. The condensed small drop receives beam 25, and its reflection light is reflected on a shell 31, to be a scatter light 33, and then introduced in a detector 47 for detection.
Inventors:
JIYOZEFU BAAJIYAA
AAMAN PII NIYUUKAAMANZU
JIYON ERU BOOTO
AAMAN PII NIYUUKAAMANZU
JIYON ERU BOOTO
Application Number:
JP25168190A
Publication Date:
October 02, 1991
Filing Date:
September 19, 1990
Export Citation:
Assignee:
TENKOOLE INSTR
International Classes:
G01N15/14; G01N21/94; G01N21/956; G01N21/88; (IPC1-7): G01N15/14; G01N21/88
Attorney, Agent or Firm:
Fukami Hisaro (2 outside)